SPIN SCRUBBER EQUIPMENT COMPRISING A WAFER TRANSFER ROBOT HAVING IMPROVED MOVEMENT,申请号KR20040003240-传众专利搜索

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发明名称	SPIN SCRUBBER EQUIPMENT COMPRISING A WAFER TRANSFER ROBOT HAVING IMPROVED MOVEMENT
摘要
申请公布号	KR20050075874(A)	申请公布日期	2005.07.25
申请号	KR20040003240	申请日期	2004.01.16
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	NAM, JU HYUN;LEE, SHIN YOUL;LIM, HYUN WOO;HWANG, TAE HA
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
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