发明名称 METHOD FOR CONTROLLING SINGLE-CRYSTAL INGOT AND SYSTEM FOR CONTROLLING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a method and a system for controlling single-crystal ingot, by which the process control of the single-crystal ingot is automated with high accuracy and works, such as reception, storing in a stocker, taking out from the stocker, etc. can be easily and smoothly carried out, without depending on. <P>SOLUTION: The method for controlling the a single-crystal ingot is used to control the process of the manufactured single-crystal ingot by writing a data of the single-crystal ingot in a radio IC tag and reading out a data therefrom, after attaching the radio IC tag to the single-crystal ingot. The system utilizes this method. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005197387(A) 申请公布日期 2005.07.21
申请号 JP20040000843 申请日期 2004.01.06
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 YAMAGISHI HIROTOSHI
分类号 G06K17/00;H01L21/02 主分类号 G06K17/00
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