| 摘要 |
PROBLEM TO BE SOLVED: To provide only a kind of load port device which is mounted on a plurality of kinds of semiconductor manufacturing apparatus. SOLUTION: On a circumferential edge of a carrier base 9 forming a load port device A, a first positioning member P<SB>1</SB>(each positioning pin 15) is mounted for setting a first wafer carrier C<SB>1</SB>through the positioning, and a second positioning member P<SB>2</SB>(each corner part positioning plate 23 and each groove forming plate 24) is mounted on the internal part of the first positioning member P<SB>1</SB>for setting a second wafer carrier C<SB>2</SB>through the positioning. When one wafer carriers C<SB>1</SB>, C<SB>2</SB>are set, these are freed from interference with the positioning members P<SB>1</SB>, P<SB>2</SB>for positioning the other wafer carriers C<SB>1</SB>, C<SB>2</SB>. COPYRIGHT: (C)2005,JPO&NCIPI
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