| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive element improved in its characteristics and made to be uniform in the characteristics. SOLUTION: A ferroelectric film 100 is formed in response to the orientations of crystal grains on the material surface of a lower electrode 103, whereby the orientations of crystal grains of the ferroelectric film are put in order. Consequently, the capacitive element is obtained in which the ferroelectric film is constituted by a single crystal or a polycrystal having the standard deviation of the orientations of the spontaneous polarizations of the whole crystal grains falling within 10°. The capacitive element enables characteristics of each capacitive element to be made homogeneous. Further, a high degree of polarizations of the capacitive element is yielded by arranging the orientations of the spontaneous polarizations of the single crystal or polycrystal in a capacitive insulating film in the direction of the application of an electric field between the upper electrode and the lower electrode. Furthermore, the reliability of the capacitive element is improved by reducing an orientation difference of adjacent crystal grains of the capacitive insulating film. COPYRIGHT: (C)2005,JPO&NCIPI
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