Method of forming a mask pattern on a substrate

摘要

A method of forming a two-dimensional mask pattern on a substrate ( 1 ). The method comprises: (a) printing a non-electrically conductive material ( 2 ) on a substrate in a coarse version of a desired mask pattern ( 3 A- 3 D); and (b) selectively ablating a portion ( 3 B) of the material using a laser to refine the coarse pattern to form the desired mask pattern.