发明名称 CAPILLARY AND CAPILLARY REGENERATING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a capillary regenerating method for regenerating a capillary by removing a substance with which the capillary is filled in short time, and to provide the capillary. <P>SOLUTION: It is judged whether the capillary 100 can be regenerated or not from a tip 100a of the capillary 100. When it is judged that the capillary can be regenerated, the substances 200 and 400 existing in a through hole 100d inside the capillary 100 are dissolved, and the substances 200 and 400 are removed. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005197417(A) 申请公布日期 2005.07.21
申请号 JP20040001341 申请日期 2004.01.06
申请人 SEIKO INSTRUMENTS INC 发明人 HATTORI OSAMU
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址