| 摘要 |
PROBLEM TO BE SOLVED: To measure an object having parts of different reflection coefficients without spending long hours. SOLUTION: The optical measurement equipment is constituted such that light reflected from the object is split and the two imaging devices 41, 42 calibrated in sensitivity convert the split light into the video signals; the displacement measurement means 530 for obtaining the displacement amount by relatively moving the focus position of the object lens of the confocal optical system to the optical axial direction; the peak detection part 521 detects that the measurement surface of the object reaches the focus position; the data selection part 522 selects the peak value of the high sensitive imaging device 41 if the output is not saturated, or selects the peak value of the low sensitive imaging device 42 if the output is saturated; and the height computing part 523 computes the height of the measurement surface of the object based on the obtained displacement amount corresponding to the peak value. COPYRIGHT: (C)2005,JPO&NCIPI
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