发明名称 |
Interlocking lid for wet bench |
摘要 |
An interlocking lid which is suitable for a wet bench tank used in the processing of semiconductor wafer substrates. The interlocking lid includes a pair of lid panels typically provided with a clasp having elements for engaging and interlocking with each other when the lid panels are in a closed position. At least one of the lids may further include a beveled lid shoulder which facilitates runoff of liquids from and hinders pooling of liquids on the exterior surface of the lid.
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申请公布号 |
US2005155976(A1) |
申请公布日期 |
2005.07.21 |
申请号 |
US20040761628 |
申请日期 |
2004.01.20 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
HUA YUEN-SHENG;YANG CHI-SHEN;LEE YUAN-BANG;CHIANG MING-ZHE |
分类号 |
B65D51/04;B65D85/30;H01L21/00;(IPC1-7):B65D51/04 |
主分类号 |
B65D51/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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