AIRTIGHTNESS INSPECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an airtightness inspection apparatus which maintains an airtight chamber for a reference sample and an airtight chamber for an object to be inspected at the same airtight condition in a simple one operation. SOLUTION: A main body 1 is provided with the airtight chamber for a reference sample 2 and the airtight chamber for an object to be inspected 3 which are adjacent to each other. A hermetic lid 4 for both the chambers is integrally attached to the main body 1 through a hinge 5 so that it turns to open and close both the chambers. The hermetic lid 4 is provided with a manual screw 6 which fastens the hermetic lid 4 to the main body 1 at a properly balanced position with respect to the openings of the both the chambers when the hermetic lid 4 is closed. The main body 1 is provided with an O-ring 7 which is fitted into a groove around each opening of each chamber and a screw hole 8 which allows the hermetic lid 4 to be hermetically pressed against the main body 1 by tightening the manual screw 6 when the hermetic lid 4 is closed. COPYRIGHT: (C)2005,JPO&NCIPI