MEASURING METHOD FOR LINE-AND-SPACE PATTERN USING SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To easily and quickly measure an average line width of a line-and-space pattern, without conducting measurement in a large number of positions. SOLUTION: The average line width, an average space width and an average pitch width are calculated based on a peak interval of an own correlation value in a differential image of the line-and-space pattern, and based on a peak interval corresponding to a line edge on a projection data of the differential image. COPYRIGHT: (C)2005,JPO&NCIPI