| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology of considerably improving the productivity of semiconductor devices by preventing stagnation of semiconductor device manufacturing in a flow shop. SOLUTION: A semiconductor manufacturing system 1 is provided with a pseudo flow shop 3, and a pseudo job shop 4. The pseudo flow shop 3 comprises cells 3a, 3b each including a group of manufacturing apparatuses which is a required minimum unit in a manufacturing process flow; and each manufacturing apparatus is well-balanced for the productivity by taking into account factors such as the processing capability, frequency of maintenance, maintenance time, frequency of occurrence of failures, and a difference from repair times in each manufacturing apparatus. Cell hosts 5, 11 are respectively provided on the cells 3a, 3b and respectively control the cells 3a, 3b as independent manufacturing lines. COPYRIGHT: (C)2005,JPO&NCIPI
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