| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a layered type gas sensor element with enhanced submergence resistance, a method for efficiently manufacturing the element, and a gas sensor equipped with this element. <P>SOLUTION: This layered type gas sensor element is equipped with a longitudinally extending plate-like element body having a ceramic substrate with a heating resistance element embedded therewithin and having a detection element layered on the ceramic substrate with a detection part formed on one end side thereof, the detection part having a pair of electrodes disposed thereon. The element body is narrowed at one end part thereof including the detection part and a first porous layer is formed on a side surface and one end surface in this portion. This manufacturing method for the sensor element is equipped, in this order, with a process for providing through holes at regions being one end part side surface and one end surface including a detection part of an unbaked sheet layered body, a process for filling the through holes with paste for the first porous layer (the formation of an unbaked porous layer 131'), a process for cutting out unbaked elements, and a process for baking these. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
