| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and a mask for evaluating a charged particle beam transfer device capable of evaluating in-plane uniformity of Coulomb effect easily and surely in the charged particle beam transfer device. <P>SOLUTION: A pattern to be transferred to a subfield region is divided into a plurality of sub-regions smaller than the subfield region, each of the plurality of sub-regions is assigned to any one of first and second complementary masks, and each of the plurality of sub-regions is assigned to any one of third and fourth complementary masks differently from the first and second complementary masks. Subsequently, the results of transferring a pattern to a body being irradiated by complementary exposure using the first and second complementary masks is compared with the results of transferring a pattern to a body being irradiated by complementary exposure using the third and fourth complementary masks. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
