| 摘要 |
PROBLEM TO BE SOLVED: To markedly improve the productivity of a semiconductor device by preventing the stagnation of manufacture of the semiconductor device in a flow shop. SOLUTION: A semiconductor manufacturing system 1 in a clean room consists of the combination of a flow shop 2 and a job shop 3. The flow shop 2 consists of a pseudo flow shop 4 and a pseudo job shop 5. In the pseudo flow shop 4, manufacturing apparatuses where productivity can be balanced taking the difference of the throughput of the manufacturing apparatuses into consideration are arranged respectively. In the pseudo job shop 5, manufacturing apparatuses where productivity can not be balanced including the manufacturing apparatuses of low and high throughput are arranged respectively, and are shared with the pseudo flow shop 4. Thus, the difference of the throughput of the manufacturing apparatuses is reduced to markedly reduce a cycle time. COPYRIGHT: (C)2005,JPO&NCIPI
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