| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of adjusting the optical axis of a beam easily with high precision in a charged particle beam optical system. SOLUTION: Two stage alignment coils 50 are arranged on the upstream side of two stage electromagnetic lenses 15 and 19. At first, a beam PB is adjusted to pass the center C of the first stage lens 15 using an alignment function having a deflection fulcrum P2 on the surface 10 of an object out of alignment functions of the alignment coils 50. Subsequently, a beam PB' is adjusted to pass the center C of the second stage lens 19 using an alignment function having a deflection fulcrum P1 on the major surface of the first stage lens 15. Since the beam does not move on the major surface of the first stage lens 15, the beam can be adjusted to pass the center C of both the first stage lens 15 and the second stage lens 19 by single operation. COPYRIGHT: (C)2005,JPO&NCIPI
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