摘要 |
PROBLEM TO BE SOLVED: To improve treatment capacity of a thin film forming device by positioning a mask and a substrate under non-vacuum environment, and later, by forming a film layer under vacuum environment, in a method of forming the thin film layer of an organic electroluminescent element. SOLUTION: This is the method for forming the thin film of the organic electroluminescent element which is adapted to forming a patternized thin film layer on the substrate by a process in which the mask is prepared, the substrate and the mask are positioned under the non-vacuum environment, the substrate and the mask are fixed, the fixed substrate and the mask are transported under the vacuum environment, and the patternized thin film layer is formed by the mask. COPYRIGHT: (C)2005,JPO&NCIPI
|