发明名称 METHOD AND DEVICE FOR FORMING THIN FILM OF ORGANIC ELECTROLUMINESCENT ELEMENT
摘要 PROBLEM TO BE SOLVED: To improve treatment capacity of a thin film forming device by positioning a mask and a substrate under non-vacuum environment, and later, by forming a film layer under vacuum environment, in a method of forming the thin film layer of an organic electroluminescent element. SOLUTION: This is the method for forming the thin film of the organic electroluminescent element which is adapted to forming a patternized thin film layer on the substrate by a process in which the mask is prepared, the substrate and the mask are positioned under the non-vacuum environment, the substrate and the mask are fixed, the fixed substrate and the mask are transported under the vacuum environment, and the patternized thin film layer is formed by the mask. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005197207(A) 申请公布日期 2005.07.21
申请号 JP20040255818 申请日期 2004.09.02
申请人 DELTA OPTOELECTRONICS INC 发明人 LEE YU-SAN;CHIN KENRYO;CHIN JUNKAN;CHIN RAISEI
分类号 H05B33/10;C23C14/24;G10H3/00;H01L21/00;H01L29/08;H01L35/24;H01L51/00;H01L51/50;H01L51/56;H05B33/14;(IPC1-7):H05B33/10 主分类号 H05B33/10
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