| 摘要 |
PROBLEM TO BE SOLVED: To prevent a force in axial direction and a force generating bending from acting on a screw shaft when a rotating force is transmitted to the screw shaft for moving a table. SOLUTION: A table mobile device is equipped with: a table 17 being a movable member provided with a nut for screwing to a screw shaft 25; a shaft installed spur gear 53 which is integrally installed on the screw shaft 25; a parallel rotating shaft 51 which is parallel with the screw shaft 25; a parallel rotating shaft-installed spur gear 52 which is integrally installed on the parallel rotating shaft 51 and engages with the shaft installed spur gear 53; an output side universal joint 27 which couples the parallel rotating shaft 51 and an output end part being one end of a flexible rod 28 for expansion and contraction; an input side universal joint 29 which couples the input end part being the other end part of the flexible rod 28 and one end part of a drive shaft 31 driven rotatively, and a rotation drive device which rotatingly drives the drive shaft 31. COPYRIGHT: (C)2005,JPO&NCIPI
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