| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for inspecting a substrate or a panel capable of detecting a posture of an inspection object quickly by simple constitution and capable of regulating the posture of the inspection object, in place of a conventional method for inspecting the substrate or the panel for inspecting the inspecting object of the substrate or the panel arrayed uniformly with the specified patterns transmitting or emitting light. SOLUTION: This method is provided with a moving process for moving relatively one or both of an imaging equipment and the inspection object along a sending direction, while preparing the imaging equipment arrayed with picture elements smaller than patterns, and while arranging an area within a view field of the imaging equipment, a data reading-in process for imaging the plurality of patterns arrayed adjacently to one side of the area during the moving process to read photoreception data of the plurality of picture elements, a data processing process for extracting respectively feature points characteristic to the patterns, based on the plurality of photoreception data, to find a straight line approximated to a line connecting the feature points. COPYRIGHT: (C)2005,JPO&NCIPI
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