| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-cost impedance measuring instrument capable of precisely measuring a contact impedance at a high processing speed and measuring an interior impedance alone by removing a component due to the contact impedance. <P>SOLUTION: A measuring part 1 measures an external reference impedance and an internal reference impedance, a constant computing part 19 computes various types of constants, and a constant storage part 18 stores the various types of constants. A contact impedance computing section 20 finds a whole impedance value including the contact impedance component and a provisional internal impedance value, when measuring the body, including the internal impedance component alone using respective voltage values measured by converting the internal reference impedance to the body in the measuring part 1 and respective arithmetic expressions of an arithmetic expression storage part 17; and finds the contact impedance value by removing the provisional internal impedance value when measuring the body from the whole impedance value; and an internal impedance computing part 21 finds the internal impedance value when measuring the body. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
