| 摘要 |
PROBLEM TO BE SOLVED: To increase the durability and reduce the size of a detector by securely detecting the axial movement stroke of a valve element as electric signals. SOLUTION: This axially moving type fluid controller comprises the valve element (sliding restrictor 4) opening and closing a fluid passage (air intake passage 2) and a fluid passage and moving in the axial direction and a spring (restrictor return spring 8) energizing the valve element to the closing side. One end of the spring 8 is locked to the valve element 4, and the other end is locked to a pressure sensor 7 detecting a load. Electric signals according to the load on the spring 8 changing according to the axial movement of the valve element 4 are outputted through the pressure sensor 7. COPYRIGHT: (C)2005,JPO&NCIPI
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