| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus, a method and a system for controlling a fluid flow. <P>SOLUTION: This flow control device includes: an inlet 9 for passing a fluid into the device; an outlet 7 for passing the fluid from the device; a pneumatic pressure controller 5; a fluid flow control valve 2 actuated by pneumatic pressure supplied via the pneumatic pressure controller 5; a flow meter 3 configured to measure the flow rate of the fluid; and a controller 4 configured to control the pneumatic pressure controller 5 at least according to the flow rate measured by the flow meter 3. Actuation of the fluid flow control valve 2 may cause adjustment of the flow rate. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
