METHOD FOR POSITIONING SUBSTRATE, AND APPARATUS FOR EXECUTING THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for positioning a substrate and an apparatus for executing the method wherein the substrate is so moved by a comparably small force obtained by a pushingly contacting mechanism as to be able to position the substrate by contacting it with a fastening guide. SOLUTION: Gas corresponding to a process atmosphere is so jetted from ventilating holes 33, 33a and 33b of a stage 1 on the rear-surface side of a substrate 2 which has been carried to the stage 1 as to make a levitating force act on the substrate 2. Further, the substrate 2 is so pressed and moved by a pushingly contacting mechanism 19 as to position the substrate 2 by contacting it with a fastening guide 14. COPYRIGHT: (C)2005,JPO&NCIPI