发明名称 |
Ionic photoacid generators with segmented hydrocarbonfluorocarbon sulfonate anions |
摘要 |
Photoacid generator salts comprising photoactive cationic moieties and segmented, highly fluorinated-hydrocarbon anionic moieties are disclosed which provide high photoacid strength and can be tailored for solubility and polarity. The present invention further relates to photoacid generators as they are used in photoinitiated acid-catalyzed processes for uses such as photoresists for microlithography and photopolymerization.
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申请公布号 |
US2005158655(A1) |
申请公布日期 |
2005.07.21 |
申请号 |
US20050029975 |
申请日期 |
2005.01.05 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
LAMANNA WILLIAM M.;CLARK GREGORY D.;FLYNN RICHARD M.;QIU ZAI-MING |
分类号 |
G03F7/004;G03F7/038;(IPC1-7):G03C1/492 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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