A silica glass containing from 3 to 10 mass% of TiO2, which has a coefficient of thermal expansion from 0 to 100 °C, i.e. CTE0 to 100, of 0 ± 300 ppb/ °C and an internal transmittance per mm in thickness within a wavelength region of from 200 to 700 nm, i.e. T 200 to 700, of at most 80%.