| 发明名称 |
LASER MASK, CRYSTALLIZATION METHOD, DISPLAY ELEMENT USING THE SAME, AND MANUFACTURING METHOD THEREOF |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser mask obtaining a thin film having uniform crystallization characteristics without any X- and Y-overlaps, by applying a slit having a fixed pattern to the mask and considering repeatability in such a slit for advancing laser crystallization, and to provide a crystallization method utilizing the laser mask. <P>SOLUTION: The laser crystallization method includes steps of: providing a substrate on which a silicon thin film is formed; positioning the laser mask composed of four blocks having a periodicity pattern including a plurality of transmission regions and one cut-off region on the substrate; and crystallizing the silicon thin film by emitting laser beams via the laser mask. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
| 申请公布号 |
JP2005197730(A) |
申请公布日期 |
2005.07.21 |
| 申请号 |
JP20040382126 |
申请日期 |
2004.12.28 |
| 申请人 |
LG PHILIPS LCD CO LTD |
发明人 |
YOU JAESUNG |
| 分类号 |
G02F1/136;B23K26/06;H01L21/20;H01L21/268;H01L21/336;H01L21/77;H01L21/84;H01L29/04;H01L29/786;(IPC1-7):H01L21/20 |
主分类号 |
G02F1/136 |
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