| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analysis method, an X-ray analysis apparatus, and a computer program capable of making a coating material undergo an accurate quantitative analysis by removing effects of a scattered X-ray component of an object when the sample coating material formed by coating the object with the coating material undergoes a quantitative analysis. SOLUTION: A sample formed by coating the object with the coating material is irradiated with X rays. The intensity of fluorescent X rays and the intensity of scattered X rays both generated by the irradiation are measured. On the basis of the relation between the intensity of the fluorescent X rays of the object and sample thickness and the relation between the intensity of the scattered X rays of the object and sample thickness, the thickness of the sample corresponding to a measurement value of the intensity of the fluorescent X rays of the object is determined. The intensity of the scattered X rays of the object corresponding to a determined thickness of the sample is determined. On the basis of both the determined intensity of the scattered X rays of the object and the measured intensity of the scattered X rays, the intensity of scattered X rays of the coating material is computed. The measured value of the intensity of the fluorescent X rays of the coating material is corrected through the use of a computed intensity of the scattered X rays of the coating material. The coating material undergoes the quantitative analysis through the use of a corrected measurement value of intensity of fluorescent X rays. COPYRIGHT: (C)2005,JPO&NCIPI
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