Device for and method of creating a model for determining relationship between process and quality

摘要

A model creating device inputs process status data that are obtained in time series during a period during which each of process steps of a process is carried out and are related to status of this process, as well as inspection result data related to object articles that were processed by said process. An extracting part extracts a characteristic quantity from the process status data for every unit object article and for every process step. An analyzing part carries out an analysis by data mining by using the characteristic quantities and inspection result data in correlation with the unit object articles and creates a process-quality model that shows a relationship between the correlated characteristic quantities and inspection result data.