| 发明名称 |
EXCIMER LAMP IRRADIATION DEVICE AND METHOD FOR USING THE SAME |
| 摘要 |
<p>In an excimer lamp irradiation device, an excimer lamp is arranged in a lamp house. Excimer light irradiated from the excimer lamp irradiates an object to be irradiated without passing through a glass window. The surface temperature of the excimer lamp is 100°C or higher.</p> |
| 申请公布号 |
WO2005065817(A1) |
申请公布日期 |
2005.07.21 |
| 申请号 |
WO2004JP19762 |
申请日期 |
2004.12.24 |
| 申请人 |
JAPAN STORAGE BATTERY CO., LTD.;HOSOTANI, KOJI;SAKAMOTO, HIROMI |
发明人 |
HOSOTANI, KOJI;SAKAMOTO, HIROMI |
| 分类号 |
B01J19/12;H01J65/00;(IPC1-7):B01J19/12 |
主分类号 |
B01J19/12 |
| 代理机构 |
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