CHARGED PARTICLE BEAM DEVICE EQUIPPED WITH SIDE ENTRY TYPE SAMPLE MOVING MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a sample moving mechanism of a charged particle beam device hardly affected by vibration. SOLUTION: The vibration of a stage 10 is reduced by heightening damping factor of the stage 10 by generating a friction by making a contact body 23 contact the antinode of the intrinsic vibration of the stage. Further, the part from a spherical body 9 to sample side is made to hardly resonate by heightening the eigenfrequency higher than the frequency of external vibration by reducing the weight and heightening the rigidity of the part. COPYRIGHT: (C)2005,JPO&NCIPI