| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a carbon nano-structure by which the carbon nano-structure can be grown even when the adhesion force between a substrate 4 and a catalyst 8 is strong. SOLUTION: The method for producing the carbon nano-structure comprises performing chemical vapor deposition of the carbon nano-structure on the substrate, on which a catalyst metal is formed, by introducing a raw material gas containing carbon and thermally decomposing. Before introducing the raw material gas containing carbon, the surface of the substrate is subjected to surface treatment comprising allowing a carbon-free ionized gas to collide with the substrate, so as to make the catalyst metal into fine particles, and thereafter, the carbon nano-structure is grown. COPYRIGHT: (C)2005,JPO&NCIPI
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