IMPROVED ACCURACY FIDUCIAL MARKS FOR TRENCH IMPLEMENTATION IN OPTICAL TRANSCEIVER PLATFORMS

摘要

A method for manufacturing a planar lightwave circuit (PLC) based optical module comprising at least one component to be aligned based on fiducial marks, the method comprising: depositing a waveguide layer; defining a waveguide and at least one fiducial mark in the waveguide layer; etching a trench for placement of an optical component, the etching of the trench removing the at least one fiducial mark, the etching further defining a topography (780) reflecting the at least one fiducial mark; depositing a metal contact layer (520); and aligning a component (550) with the waveguide, the component being in contact with the metal contact layer, the aligning being accomplished at least partially utilizing the topography reflecting the at least one fiducial mark.