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发明名称
KONISCHE PRALLFLACHE ZUR REDUZIERUNG DES AUFLADUNGSDRIFTS IN EINEM TEILCHENSTRAHLGERAT
摘要
申请公布号
DE69733544(D1)
申请公布日期
2005.07.21
申请号
DE19976033544
申请日期
1997.10.07
申请人
APPLIED MATERIALS, INC.
发明人
VENEKLASEN, H.;YOUNG, J.
分类号
H01J37/09;H01J37/147;(IPC1-7):H01J37/09
主分类号
H01J37/09
代理机构
代理人
主权项
地址
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