发明名称 |
Positive tone lithography in carbon dioxide solvents |
摘要 |
A method for carrying out positive tone lithography with a carbon dioxide solvent system is carried out by (a) providing a substrate having a polymer resist layer formed thereon; (b) exposing at least one portion of the polymer resist layer to radiant energy to form at least one light field region in the polymer resist layer; and then (c) contacting the polymer resist layer to a carbon dioxide solvent system, the solvent system preferably comprising a polar group, under conditions in which the at least one light field region is preferentially removed.
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申请公布号 |
US6919167(B2) |
申请公布日期 |
2005.07.19 |
申请号 |
US20020294222 |
申请日期 |
2002.11.14 |
申请人 |
MICELL TECHNOLOGIES |
发明人 |
DEYOUNG JAMES;MCCLAIN JAMES B. |
分类号 |
G03F;G03F7/00;G03F7/32;G03F7/36;(IPC1-7):G03F7/36 |
主分类号 |
G03F |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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