发明名称 Adjusting device for displacing individual elements of optical systems or of measuring systems
摘要 In an adjusting device for displacing individual elements ( 2 ) of optical systems or of measuring systems in which the element to be displaced is movable on a base ( 1 ) along a predetermined direction (x) by means of a piezoelectric actuator arrangement ( 21, 22 ) which is supported by the element ( 2 ) and which is constructed and controllable in such a way that it exerts shock pulses on the element ( 2 ) in order to carry out a stepwise movement of the element ( 2 ) on the base ( 1 ), the element ( 2 ) is arranged in a body ( 1; 27 ) which has an open or closed hollow cross section and is supported in a frictional engagement on this body, at least at one location, with the intermediary of a pretensioned spring device ( 8, 8' ).
申请公布号 US6919666(B2) 申请公布日期 2005.07.19
申请号 US20020980722 申请日期 2002.02.13
申请人 CARL ZEISS JENA GMBH 发明人 BARTZKE KARLHEINZ;MACK STEFAN;BURKHARDT MATTHIAS;HARTMANN THOMAS;STEINER REINHARD;DITTRICH PETER;KLOPFLEISCH KARL-HEINZ
分类号 G02B7/08;H01L41/09;H02N2/00;H02N2/04;(IPC1-7):H01L41/08;H01L41/08 主分类号 G02B7/08
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