ENCAPSULATED MEMS BAND-PASS FILTER FOR INTEGRATED CIRCUITS AND METHOD OF FABRICATION THEREOF

摘要

Communication signal mixing and filtering systems and methods utilizing an encapsulated micro electro- mechanical system (MEMS) device. Furthermore, disclosed is a method of fabricating a simple, unitarily constructed micro electro-mechanical system (MEMS) devic e which combines the steps of signal mixing and filtering, and which is smaller, less expensi ve and more reliable in construction and operation than existing devices currently employed in the technology.