Cyclone for separating particles from gases such as air, comprises filtering with microstructure filter and transporting filtered particles using inertia

摘要

The gas is filtered with a microstructure filter and the filtered particles are transported to a given collection space by inertia forces. Separating and collecting particles such as dust particles and microorganisms from a gas such as air comprises filtering the gas with a microstructure filter and transporting the filtered particles to a given collection space by means of inertia forces. The microstructure is one produced by microstructural technology, MEMS technology or micromachining techniques (e.g. chemical etching, reactive ion etching, LIGA, sacrificial layer etching), as well as by thin-film techniques for depositing and finishing thin layers (e.g. vaporizing, sputtering, oxidation, nitridization, implanting or chemical vapor deposition), optionally in combination with a lithography technique. An independent claim is also included for the filter device (1).