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发明名称
Vapor depositing device
摘要
申请公布号
KR100501229(B1)
申请公布日期
2005.07.18
申请号
KR20030039776
申请日期
2003.06.19
申请人
发明人
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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