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发明名称
Cooling Apparatus For Module Ram Handler
摘要
申请公布号
KR100502053(B1)
申请公布日期
2005.07.18
申请号
KR20020064998
申请日期
2002.10.23
申请人
发明人
分类号
G01R31/26;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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