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发明名称
CHEMICAL MECHANICAL POLISHING PAD CONDITIONER AND THE FABRICATION METHOD OF IT
摘要
申请公布号
KR20050073734(A)
申请公布日期
2005.07.18
申请号
KR20040001799
申请日期
2004.01.10
申请人
MEMSWARE
发明人
CHO, SOO JE
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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