| 申请人 |
SAMSUNG ELECTRONICS CO., LTD.;ULVAC, INC. |
发明人 |
LEE, KWANG MYUNG;YUN, KI YOUNG;KIM, IL KYOUNG;PARK, SUNG WOOK;CHAE, SEUNG KI;HUR, NO HYUN;KIM, JAE WOOK;AN, JAE HYUCK;KIM, WOO SEOK;KIM, MYEONG JIN;JANG, KYOUNG HO;YANAGISAWA SHINJI;TSUTSUMI KENGO;TAKAHASHI SEIICHI |
