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发明名称
基板搬送装置及基板搬送方法、曝光装置及曝光方法、元件制造方法
摘要
为提供一基板搬送装置,可防止残留于经液浸曝光的基板上的液体所导致之元件性能劣化。基板搬送系统H,系供搬送透过投影光学系统PL与液体LQ来进行图案像曝光的基板P,其具备液体检测器80,供检测附着于基板P的液体LQ。
申请公布号
TW200523684
申请公布日期
2005.07.16
申请号
TW093130457
申请日期
2004.10.08
申请人
尼康股份有限公司;藏王尼康股份有限公司
发明人
堀内贵史;太田笃
分类号
G03F7/20;H01L21/027
主分类号
G03F7/20
代理机构
代理人
林镒珠
主权项
地址
日本
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