| 摘要 |
PROBLEM TO BE SOLVED: To easily and expeditiously detect a fault part of an electrode formed on a substrate in manufacturing a plasma display panel or the like. SOLUTION: In a test device of an electrode 13 formed on a substrate 14, this has a substrate temperature adjustment means (heat conductor 16, heater 17, thermocouple 18 and temperature control device 19) to control a temperature of the substrate 14, an electrode temperature control means to control the temperature of the electrode 13, and an infrared ray detecting means (infrared camera 20) to detect infrared rays irradiated from an electrode region in which the electrode 13 is formed, and a non-electrode region other than that electrode region. Then, the test of the electrode 13 is carried out by detecting the infrared rays irradiated from the electrode region in which the electrode 13 is formed and the non-electrode region other than that electrode region by making the respective temperatures of the substrate 14 and the electrode 13 different. COPYRIGHT: (C)2005,JPO&NCIPI
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