Non-contact surface configuration measuring apparatus and method thereof

摘要

A non-contact surface configuration measuring method is provided which allows for accurate measurement of a surface which is at a steep angle to a laser probe. Specific areas including parts inclined ±30° or more from an optimum measurement state relative to the laser probe are measured after a workpiece is rotated such that the surface within the specific areas is less than ±30°. Therefore, accurately measured data on the specific areas can be obtained even in a different coordinate system from that of a general area.