VERTICAL HEAT TREATMENT DEVICE AND METHOD OF CONTROLLING THE SAME

摘要

A vertical heat treatment device includes a treatment container (5) having a treatment region (A1). The treatment region (A1) is set so as to receive to-be-treated substrates (W) held at vertical intervals. The device also has a heating furnace (8) having an electric heater (15) provided so as to surround the treatment container (5) and has an electric blower (16) for blowing a cooling gas into the heating furnace (8). In order that the temperature of the treatment region (A1) converges to the target temperature, a control section (22) supplies electricity to the heater (15) to heat the treatment region (A1) up to a predetermined temperature immediately below a target temperature. When the predetermined temperature is reached, the power supply to the heater (15) is reduced, and simultaneously, the treatment region (A1) is forcibly cooled by a cooling gas supplied by the blower (16).