| 摘要 |
PROBLEM TO BE SOLVED: To provide a dehydrating method for a substrate and a dehydrating device, which obtain an enough dehydrating effect by suppressing the readsorption of water to a component of an organic electroluminescence element after thermal dehydration process. SOLUTION: The dehydrating device A dehydrates a substrate (supporting substrate) 10 provided with the organic electroluminescence element where a first electrode formed in a predetermined shape, an insulating layer, an organic layer having at least a light-emitting layer, and a second electrode, are sequentially laminated. The dehydrating device A comprises a heat chamber 3 for performing thermal dehydration process by heating the substrate 10 provided with at least the insulating layer, and a temperature-lowering chamber 4 for a temperature-lowering process where the temperature of the substrate 10 is lowered while keeping an atmosphere in a low dew point after the thermal dehydration process. COPYRIGHT: (C)2005,JPO&NCIPI
|
