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发明名称
KONTAKTLOCHHERSTELLUNG MIT HILFE SICH KREUZENDER PHASENSPRUNGKANTEN EINER EINZIGEN PHASENMASKE
摘要
申请公布号
DE59912166(D1)
申请公布日期
2005.07.14
申请号
DE19995012166
申请日期
1999.09.17
申请人
INFINEON TECHNOLOGIES AG
发明人
GRASSMANN, ANDREAS;FRIEDRICH, CHRISTOPH;GRIESINGER, UWE;PFORR, RAINER;WIDMANN, DIETRICH
分类号
G03F1/00;G03F7/20;(IPC1-7):G03F1/00
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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