| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for treating sulfur hexafluoride gas to be used as an insulating medium of a gas insulation switchgear, or the like and a dry etching agent or a fluorinating agent of LSI (large scale integrated circuits). <P>SOLUTION: This method for treating exhaust gas, namely, bringing exhaust gas containing sulfur hexafluoride gas into contact with a treating agent to remove the sulfur hexafluoride gas from the exhaust gas comprises a preceding step to use catalyst-containing silicon oxide as the treating agent and produce silicon fluoride gas and sulfur oxide gas and a succeeding step to treat the gases produced at the preceding step by an alkali chemical-packed cylinder or a wet scrubber. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
