SLIT NOZZLE AND SUBSTRATE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To make aperture intervals of discharge outlets formed in a slit nozzle even in the longitudinal direction of the slit nozzle. SOLUTION: With respect to the slit nozzle of a substrate treatment apparatus, a straight line dividing an angleψformed between an upper end line 411e of a mutually restricting face S and a lower end line 411c of the mutually restricting face S into equal parts is determined to be a reference line L. In a second body part 411, a group of second screw holes 411a for screwing bolts into for bonding the second body part 411 to a first boy are arranged in the reference line L determined as described. COPYRIGHT: (C)2005,JPO&NCIPI