| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To eliminate a necessity of mechanical adjustment for a XY stage by utilizing pattern recognition in an initial setting of a laser trimming apparatus. <P>SOLUTION: A rotation angleθ1 required to set a reference axis on a coordinate system of a beam positioner parallel to X-axis of XY stage, a rotation angleθ2 required to set the reference axis of a work table parallel to X-axis of XY stage, and an angleθ3 which is made by intersection of X-axis of XY stage with a straight line joining two measuring terminals of a probe are obtained by using pattern recognition. By turning the work table byθ3-θ2 while turning the reference axis on the coordinate system of the beam positioner byθ3-θ1, the reference axis of the work table, the reference axis on the coordinate system of the beam positioner and the straight line joining the two measuring terminals of the probe are made parallel. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
