| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater having a stable firing performance as a result that a resistivity change is small even in the case the ceramic heater is used for a long term. SOLUTION: In the ceramic heater in which an exothermic resistor consisting of a conductive ceramics and a reed part for supplying electric power to the exothermic resistor are embedded in nitride ceramics, and to which a high voltage of 100 V or more is applied, the spacing between the exothermic resistor and the reed part is made 1 mm or more. COPYRIGHT: (C)2005,JPO&NCIPI
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